Chapter 594： [Purple Star Lithography, prepare to expose it]

Another major bottleneck of EUV lithography is undoubtedly the photoresist.

The current status of the industry is that the supply of semiconductor materials is very concentrated, and photoresist technology is considered to be the most concentrated in the world, and the barrier is also the highest material, which is occupied by 95% of the market share by Japan and North America.

Although Samsung Electronics Semiconductor is bullish, it is also very powerful, but in fact it depends on the face of the Japanese. If Japanese semiconductor material vendors are looking at the material, Samsung Semiconductor will be lying.

A temporary technical exchange is under discussion in the lounge. An engineer responsible for photoresist technology said in an orderly manner: "In 248nm and 193nm lithography, the mainstream has been using organic chemical amplification for more than two decades. Photoresist CAR, which is a photosensitive polymer used to make patterns. "

Under the extreme ultraviolet lithography machine, the photonic special machine CAR photoresist generates photoacid, and then the CAR photoresist undergoes a photoacid catalyzed reaction during the exposure process, thereby generating a photolithography pattern.

The principle is such a principle.

The engineer continued: "CAR photoresist is used in extreme ultraviolet lithography technology, but because the energy of the light source has been greatly increased, the previous practical results show that there will be different and complex results, which will affect the yield of the chip. . "

Luo Sheng nodded and said, "When we reach the EUV technology node, this is not only our problem, competitors will also encounter similar problems, and we have to develop new ideas. I would like to try other semiconductor equipment and material manufacturers in the industry. Various ways, or propose new photoresist technology solutions, so that extreme ultraviolet lithography technology can continue to be used, thereby extending the life of Moore's Law. "

The engineer just said again: "In terms of new ideas, our project team has multiple teams trying on new EUV photoresists in various directions, such as still liquid metal oxide photoresists, as well as dry R & D of photoresist, etc. "

Luo Sheng thought for a while and said in a deep voice: "We can't do it ourselves. The new EUV photoresist technology is best to contend with hundreds of schools, and use the breeding strategy to develop an ASML in the photoresist field.

Hearing this, Li Chunsheng immediately put up a sentence: "That has to pay several times the cost."

Luo Sheng spread his hands and said: "So much has been invested in the semiconductor sector. There is no escape route except for kryptoning to the death."

At this point, he immediately asked Li Chunsheng: "Yes, what are the domestic suppliers of semiconductor photoresist?"

Li Chunsheng: "There are several, but their existing technology and market share are not inferior to the international top level. The relatively well-known photoresist manufacturers are Kehua, Jingrui and Nanda. Optoelectronics, Rongda Photosensitive, and Shenyang Xinyang. For the research of photoresist, the Cote d’ Azur Laboratory has technical exchanges with several manufacturers. "

Luo Sheng nodded without saying much, and immediately looked to the person in charge of the photoresist project just now: "What are the specific progress of the new ideas?"

"The project team is conducting a demonstration study on the topic of negative photoresist. Its molecular size is one-fifth of that of CAR organic photoresist. The key point is that the light absorption rate can reach four to five times that of CAR. Precisely and more accurately shape the circuit diagram. "

Luo Sheng looked at the internal database and nodded and said: "Dry photoresist technology can focus on investment. This new EUV dry photoresist technology replaces the traditional CAR photoresist for semiconductor processes. Evolution is promising and may be a huge breakthrough point. "

The advantage of this new technology is to improve the sharpness and resolution of extreme ultraviolet lithography technology, but also can reduce the original photoresist usage by five to ten times, bringing significant results in cost savings.

The cost of chips born under new technology nodes is very high, especially in the early stage.

Under the current industry dominated by organic chemically amplified photoresist CAR and inorganic photoresist n-CAR, liquid photoresist technology is used. The research of new EUV photoresist technology is not only the Cote d’ Azur laboratory, but overseas manufacturers. In actively promoting the development of new technologies, after all, extreme ultraviolet lithography technology is a megatrend, and this will not change the fact.

But only the new EUV photoresist technology of the Côte d'Azur Coast Laboratory is based on dry precipitation technology, which is an original technology.

The current mainstream photoresist technology is CAR, which is to spin-coat the liquid photoresist with the coater equipment on the wafer, and then remove it after exposure to the solvent.

This new technology of the Côte d'Azur Coastal Laboratory is different from the traditional liquid photoresist coating method. It changes the chemical reaction in the cavity and allows the dry photoresist to be manufactured in chemical vapor deposition or atomic layer deposition. Removed by etching process.

This has the advantage that it can improve the imaging sensitivity, resolution and resolution of extreme ultraviolet lithography exposure.

More importantly, it can improve the cost of process wafers. These advantages are the reflection of more advanced processes.

Luo Sheng closed the data panel and put the work computer aside, saying: "As long as the dry photoresist technology is done, we can form two camps with Japanese equipment materials, which can break through the existing semiconductor technology rules, which is very The point is that the entire industry will also bring about profound changes. There is nothing to say, we have invested so much, except for victory, there is no second way to choose. "

Everyone present nodded silently, and the fighting spirit was also flourishing. The current breakthrough gave the team great confidence.

Indeed, apart from victory, there is no second way to choose from, and I believe that victory will inevitably be achieved.

The interim meeting was over. Luo Sheng personally made an additional allocation of RMB 450 million to the photoresist project team on the Cote d’ Azur experiment, speeding up the research and development progress, and paralleling multiple lines.

After leaving the Cote d'Azur laboratory, Luo Sheng called Yao Jianhong to his office half an hour later.

"Purple Star lithography machine should come out. Once it is officially exposed, not only the domestic integrated circuit field will be turbulent, but the global integrated circuit industry will set off a violent shock. The industry pattern will be reshuffled. The turbulence in the industry is inevitable. . "

Luo Sheng touched each other's fingers and said, "After a while, the breakthrough in lithography equipment is naturally an unprecedented victory, but for the entire semiconductor industry chain, we still haven't got through the high-end area, and 60% of the technical links are still subject to humans. , But the product line of the Côte d’ Azur cannot be broken. In short, we still need foreign chip supply for a while. "

It is no longer effective to describe how to spend money like running water, and there should not be a cliff-like collapse in the income of the Cote d’ Azur.

Game consoles, Azure smartphones, ieP tablets, and another major PC business, which is about to launch, must create a stable source of income to ensure profits to maintain the stability of the company ’s current hematopoietic cycle.

Yao Jianhong lowered his head and pondered for a moment, then immediately looked at Luo Sheng and said: "You mean ..."

Luo Sheng stared at him: "Our actual situation is that 60% of the technical links are still stuck. We may have to wait another three to five years for a complete breakthrough. This is an objective fact and a breakthrough in technological research. There is also a certain chance. It does n’t mean how much money I put in and how much money I put in there must be output. "

Yao Jianhong nodded, but did not answer the call, but continued to listen.

Luo Sheng added: "It's true and false, true and false, the breakthrough of the Purple Star Lithography Machine is a fact. This is where our biggest bargaining chip lies and can bluff foreigners."

Speaking of which, Luo Sheng couldn't help but smile comfortably, Yao Jianhong thought for a moment, and sifted Luo Sheng's remarks, but suddenly he was suddenly bright.

"Mr. Luo, you mean that it is announced that not only the breakthrough of the extreme ultraviolet lithography machine technology, but also all the key technical links of the entire semiconductor industry chain have been broken through, or the breakthrough is just a matter of time. Breakthrough, but because even the extreme ultraviolet lithography machine is done, this will give outsiders an illusion, and other technical links have basically been opened up, thus gaining the leading power in negotiations. "

Luo Sheng smiled and said nothing, but nodded in recognition.

Looking at this issue from a competitor's point of view, since the technical ban has not had much effect on Luo Sheng, it would not make much sense to continue the ban.

In fact, there are gambling elements in it. Those who are international semiconductor manufacturers believe that Luo Sheng ’s domestic semiconductor industry chain plan has successfully broken through the technical blockade.

But the seemingly gambling component actually has inherent logic to follow.

Those international manufacturers are also going to eat, and seeing that their market share will soon be insecure, the original unbreakable covenant will surely crack due to differences in interests.

Even the extreme ultraviolet lithography machine has been made, and it is slightly ahead of ASML. This is an objective fact. For those semiconductor manufacturers in the world, the results they saw, this shock brought them shock. Is unparalleled.

This is Luo Sheng's opportunity, and also an opportunity for the domestic semiconductor supply chain.

In addition, for many years, Luo Sheng has emphasized on public occasions that it must be in line with international standards, actively open and integrate into the world, and must walk on two legs. It must not only develop independently, but also continue to buy foreign high-end chips, and maintain uninterrupted exchanges with the world.

Therefore, even if the Zixing lithography machine comes out and the domestic semiconductor industry chain is opened, it will continue to cooperate with foreign chip manufacturers.

This is clearly stated before. Now that the Azure Coast exposes the purple star lithography machine, it is exaggerated to say that it has broken through the key technical links of the domestic semiconductor industry chain, but I will continue to cooperate with foreign manufacturers. Sell ​​the chip to me and I will buy it.

International competitors will also believe that what he said is true.

Because the market is large enough, plus Luo Sheng also said before that some money can be earned, but not earned, it must be left to others.

Real, fake and real, those manufacturers in the world will involuntarily connect these series of problems for a comprehensive analysis, and the result is that their technical advantages are really gone, and no longer put down the proud head, No money was made.

Think about the scale of the annual import value of the chip industry in the Greater China market exceeding 300 billion US dollars. In the past, it was necessary to import, and now the Chinese can solve it by themselves.

This is disastrous news for some companies in the ICT field overseas, especially some semiconductor companies in Silicon Valley. If they do not have the Greater China market, they will starve to death. There will definitely be a large number of semiconductor manufacturers that go bankrupt and go bankrupt. The factory can resist but the business decline is inevitable.

So they dare not gamble because they cannot afford to lose.

Because of this, Luo Sheng dared to gamble, and there is 100% certainty that he will win. Since 100% certainty can win, he cannot be called a gamble. Instead, he should be strategic.

Luo Sheng said to Yao Jianhong: "Lao Zhang, you sent someone to shoot a promotional video for Zixing lithography machine, and some of the breakthrough monopoly blockade technology nodes and achievements are displayed in a dignified manner. The shooting is more beautiful, but the core technicians are mosaic, Some of the core technologies are also mosaic, and then hyped up, the purple star lithography machine is the trump card in the ace of the Jedi comeback. It is not an exaggeration to say that this is a decisive factor for the next negotiation, do n’t mess up. UU Read the book "

"Leave it to me."

Yao Jianhong nodded heavily. For a moment, he couldn't help but photographed his thigh, and said fiercely: "This time the labor and management can pat the table in front of the other party at the negotiating table. They also dare to be angry and dare to speak, I dare The other party doesn't dare to pat the table and walk away. The other party would have to beg me if I patted the table and walked away. "

Holding technology in one hand and sitting in the greater China market of $ 300 billion in one hand is unprecedented.

Luo Sheng could n’t help but laugh when he saw Yao Jianhong ’s reaction. He understood his inner emotion at the moment. He resigned from Silicon Valley more than ten years ago, gave up the high salary there and took the initiative to come to the Cote d’ Azur to apply for a job. A technology company that wants to show off its strengths in the field of integrated circuits, it was not long before the company started.

For the Côte d'Azur, this breath has been held for eleven years, and for Yao Jianhong, he has held it for more than two decades.

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