Chapter 94： Chapter 102103

Chapter 94 Chapter 102103 EVU Alliance

(The chapter name is wrong, EUV Alliance)

"Furukawa-kun? What's the matter?" Everyone looked at him suspiciously.

Furukawa Taichi said: "Just now, the Chinese Academy of Sciences announced that they have broken through the extreme ultraviolet photoresist production technology and will start mass manufacturing and production of high-end photoresists!"

"What?" The representatives of several major groups stood up abruptly, "This is not something to be joking!"

"I'm not kidding!" Furukawa Taichi said, "Several photoresist companies in China announced that they have obtained technical authorization, immediately build factories and start production!"

Everyone saw him in anxious tone, not like telling lies, and immediately inquired about information.

Soon, they saw the news.

"Is the confirmation news true?" A representative of the Tokyo Ohka Group called and asked the president of the group's Shenzhou region.

"It's true, we have sent someone to contact, and they also specially displayed samples and related data!" The other party replied.

"Why is it so fast?" In the venue, the representatives of these cherry blossom photoresist companies looked at each other. They have only been out of stock for a month, right?

In one month, their technological advantages and product monopoly are gone?

Even Aoki Taiki was stunned. If this were the case, wouldn't they lift a rock and hit them in the foot?

They have just withdrawn from the China market, and China has its own high-end photoresist. Isn’t this giving up market share in vain? Is there such a stupid thing in the world?

"Baga!" the representative of JSR scolded, "This is a market of tens of billions of dollars a year. Because of a stupid agreement, did you hand it over?"

Dagui Aoki did not dare to speak casually, and the energy of these multinational groups was not small. He could only say with a guilty conscience: "Maybe they have broken through this technology long ago, and they have only announced it now."

"No!" Furukawa Taichi said angrily, "This is completely caused by your stupid agreement!"

"I got the news that because of this incident, China has mobilized experts from across the country and united tens of thousands of companies to develop together, so the progress is so fast! Under normal circumstances, they will never be able to break through the extreme ultraviolet photoresist technology so quickly. !"

Hearing Furukawa Taichi's words, other representatives glared at Aoki Taiki. They spent decades competing with Deng Country’s enterprises and finally established their position as the leading international photoresist. They did not expect to be overtaken within a month!

All this is caused by the "full cooperation" agreement!

"Aoki-kun, we need an explanation!" said the representative of JSR.

"Our loss was caused by the manager of Sakura Country! He must come up with a solution!" said the representative of Tokyo Ohka.

"Our group will issue a letter of protest!" Fujifilm representatives said in a cold voice. The protest they said was not about letting employees take to the streets to protest, but a game at a higher level.

These big capitals are inextricably linked with the management of Sakura Island, and Daiki Aoki is sweating coldly behind him. He knows that his faction has offended a big capital group!

When the time comes, someone will definitely have to back the pot to calm their anger, and they are likely to become the back pot!

"Why, this is only a month!" Aoki Daiki shouted in his heart, this technological breakthrough will be a few months later, China will definitely give in, but why is it so fast?

...

The breakthrough of extreme ultraviolet photoresist represents that the most critical material problems in lithography machine and chip manufacturing have been solved.

At the same time, Lu Jianye's team has polished the "lens" required by the extreme ultraviolet lithography machine. In the past, this thing was also one of the products that could not be bought with money. Only Hans Zeiss could manufacture it. Now, Shenzhou can manufacture it by itself.

Other high-end components are also being manufactured simultaneously.

The chip design is rather simple. China could have designed high-precision chips, but they couldn't make them. He Xingzhou made a slight improvement and completed the design of a 3nm process chip.

Now from the manufacturing of extreme ultraviolet lithography machines and the production of 3 nanometer process chips, there is only the last problem-extreme ultraviolet light knife!

He Xingzhou came to the Institute of Optoelectronics and researched with the team of Academician Yan Rui.

In the laser research room, Yan Rui is talking about the problems they encountered: "We are now using gas jets to bombard the target material with a laser to generate plasma. The plasma emits EUV radiation. The EUV radiation passes through a periodic multilayer film mirror. The composed focusing system is incident on the reflective mask. The emitted EUV light waves pass through the projection system composed of mirrors to image the geometric pattern of the integrated circuit on the reflective mask into the photoresist on the silicon wafer to form an integrated circuit The required lithography pattern."

"Theoretically, there is no problem with this process." He Xingzhou nodded.

"But the problem is how to increase the wattage of the EUV light source while reducing the particles, high-speed particles and other pollutants in the plasma atmosphere." Yan Rui said with a headache, "otherwise the light source will deteriorate rapidly. Also, the extreme ultraviolet projection lithography system A reflective mask is used."

"Our EUV mask still has defects as high as ldefect/cm2, and the manufacturing level of the inspection machine should be further improved."

"The problem of the inspection machine, I think Professor Lu’s team should be able to solve it." He Xingzhou said, "As for the extreme ultraviolet light source, I thought of a solution."

"What plan?" The academicians and experts all looked at him.

He Xingzhou said: "The increase in the wattage of the light source can use electricity!"

"After the high-power laser heats the load body to form plasma and reflects it multiple times, an extreme ultraviolet light source is formed. At this time, a discharge reaction chamber is designed to further transform the plasma and radiate higher brightness and purer extreme ultraviolet light. If there are also multilayer mirrors, EUV’s nanometer scale will be further improved, and it may be possible to meet the requirements of the 3-nanometer process!"

In fact, this is the solution, but He Xingzhou said it euphemistically.

"We have also imagined doing this!" Yan Rui seemed to have some thoughts, she asked: "This electric energy reaction chamber..."

"I have a design drawing!" He Xingzhou said.

"Really?!" When everyone heard him say this, their spirits were lifted, and they quickly said, "Let's see!"

"Go to the meeting room!" He Xingzhou laughed.

Everyone went to the meeting room together, He Xingzhou called Lumi, asked her to open the design drawings and explain.

When he finished speaking, the audience was silent. Everyone is thinking and calculating.

Ten minutes later, Yan Rui stood up for the first time and said with joy: "Yes! My preliminary calculation is that this solution is entirely possible to achieve the high-brightness extreme ultraviolet light source we require!"

"Yes, my opinion is the same!" An old academician stood up and said excitedly: "This discharge reaction chamber is really magical! After the light source is refracted and lost, the electrical energy will transform the plasma to form a new high-energy plasma, not only without light pollution , It has also further improved the purity of extreme ultraviolet rays. The light knife produced in this way, I am afraid that it can reach the highest level in the world!"

"Chief He, you are such a genius, you can think of such a plan!"

"What are you waiting for, let's try it out!" The experts couldn't help it.

"This is the beginning!" He Xingzhou laughed. He knew that this attempt would be a success! This is the design that I completed after more than a month of thinking and calculation after unlocking the lithography machine technology by myself!

...

Lamp country, the "Avengers Alliance" is holding a conference.

This is not the Avengers alliance in anime and movies, but the EUV Lithography Technology Alliance led by White Eagle.

It is composed of industry giants such as Intel, AMD, Motorola and IBM, plus Sandia National Laboratory and Lawrence Livermore National Laboratory affiliated to the White Eagle!

In addition to the White Eagle, the Western Alliance also has a similar one. It consists of more than 30 countries and hundreds of companies, all of which are related industries of lithography machines and chips.

Windmill Country's Asim company can produce the world's top extreme ultraviolet lithography machine because of their support!

At the moment, because of the "full cooperation" agreement, the EUV alliance of the White Eagle and the EUV alliance of the Western Alliance have begun to cooperate and discuss the "details of cooperation."

The president of the Alliance, Foster, sits as the chief. He was appointed by the White Eagle not long ago, and his style is much tougher than the previous one!

The members present are all representatives from international giants! It can be said that these companies represent the world's top lithography machine and chip technology!

"Sakura submitted a proposal to us, saying that the extreme ultraviolet photoresist technology has been conquered by China, and hopes to open the extreme ultraviolet photoresist market!" Foster said slowly, "Do you have any comments?"

"Can't open up!" The first representative who spoke was opposed. He was a representative from the Dow Group, Morton, who is also the world's top five photoresist company.

He righteously said: "Since we have reached a cooperation agreement, we must advance and retreat together. Today we will open a photoresist, and tomorrow someone will say to open the lithography machine transmission lens, and the day after tomorrow, someone will say to open the lithography machine bearing. , If this continues, isn't our cooperation agreement a dead letter?"

"Mr. Morton is right." Some members immediately supported his point and said: "The lithography machine and chip manufacturing technology must be firmly controlled in our hands, and a hole cannot be opened!"

"Furthermore, whether China's extreme ultraviolet photoresist is a laboratory product or an energy product is still inconclusive. In case this is a scam they arranged, we will be fooled!"

Multon's opinion received unanimous support, and Foster nodded and said: "In this case, we will maintain our existing measures."

In fact, for the EUV alliance, they are not a battle line with Sakura. When this alliance was established, it was aimed at Sakura's semiconductor industry.

So Sakura’s related industries live and die, they don’t care at all!

"As for the trend of China's semiconductor industry, everyone should also know it." Foster moved to the next motion.

"They also set up an organization to jointly develop lithography machines and want to catch up with us!"

Mentioning this, Heimer, the representative of Asim Lithography, said with disdain: "They will not be able to surpass us within ten years!"

"I can say that even if we give them the design drawings of the extreme ultraviolet lithography machine, the Orientals can't make it!"

"This is the world's top industrial technology, and they are far from it!"

Haimer finished speaking, the representatives present all laughed, with a haughty look on their faces, and many people thought the same as him.

Someone also reminded: “We can’t let our guard down. In the past year, they have broken through many technologies!”

Referring to this, Foster's face cooled down and emphasized: "Everyone, why are their technological breakthroughs so fast?"

"We suspect that some members may not abide by the regulations and leak technical information!"

"So starting today, all high-end equipment and technology transfers between members must be submitted to the alliance for review, and private transactions are prohibited!"

There has been an audit before, but this time we have increased our efforts to ensure that there will be no technical leaks.

For this, all members agree that only technology monopoly can make them continuously make a lot of money!

A representative of Qualcomm asked again: “We are not selling high-end chips in the East now, which is very harmful to our company. When will we be able to develop and sell them?”

"Yes, our computer chip market has also been severely affected!" The representatives of companies such as Intel, IBM, and AMD couldn't sit still.

Foster motioned everyone to be quiet, and said, "That's why we are here today."

"Before the meeting, I have communicated with Asimer, and they are designing a new generation of extreme ultraviolet lithography machine for the 3nm process."

"We need to work together to help them come up with mature 3nm process technology lithography machines and more advanced lithography machines as soon as possible. Our chip technology can be upgraded by one level, and then a first-level chip can be opened."

"Moreover, the East is under great pressure recently. They will make concessions soon. Everyone will gain more than they have lost now!"

People communicated with each other and expressed their opinions. In the end, a preliminary agreement was reached. So many companies and institutions once again joined forces to help Asmar break through more advanced lithography technology.

Asim’s representative Haimer was even more excited and said at the meeting: "Within two years, with your help, within one year, we will guarantee the delivery of a mature, new generation of extreme ultraviolet light with 3nm process technology. Engraving machine!"

"Okay!" Foster is very happy, so that he can also cross with him.

And as soon as he took office, he made such a big result, the future is boundless!

He wished Haimer: "I hope you can accomplish your goals as soon as possible. The EUV Alliance is your strongest backing!"

He thought to himself that at that time, those Orientals will definitely feel desperate!

...

At the end of the EUV Alliance meeting, Shenzhou, Northwest Optoelectronics Technology Research Institute.

He Xingzhou, Yan Rui and others are testing their extreme ultraviolet light source.

The discharge reaction chamber he designed before has been manufactured, and it is connected with the laser transmitter, and there are various reflective lenses in the middle to form the extreme ultraviolet light knife generator.

"The first test, launch the laser!" In the laboratory, Yan Rui looked at the instrument carefully and gave the experiment order.

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(End of this chapter)